Signal generation in dynamic interferometric displacement detection

Submitting author affiliation:
Universität Osnabrück, Osnabrück, Germany

Beilstein Arch. 2024, 202429.

Published 08 May 2024

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This preprint has not been peer-reviewed. When a peer-reviewed version is available, this information will be updated.


Laser interferometry is a well-established and widely used technique for precise displacement measurements. In a non-contact atomic force microscope (NC-AFM) it facilitates the force measurement by recording the periodic displacement of an oscillating micro-cantilever. To understand signal generation in a NC-AFM based on a Michelson type interferometer, we evaluate the non-linear response of the interferometer to the harmonic displacement of the cantilever in the time domain. As the interferometer signal is limited in amplitude due to the spatial periodicity of the interferometer light field, an increasing cantilever oscillation amplitude creates an output signal with an increasingly complex temporal structure. By the fit of a model to the measured time-domain signal, all parameters governing the interferometric displacement signal can be precisely determined. It is demonstrated, that such an analysis specifically allows the calibration of the cantilever oscillation amplitude with 0.15% accuracy.

Keywords:  force microscopy, NC-AFM, displacement detection, interferometer signal, amplitude calibration

How to Cite

When a peer-reviewed version of this preprint is available, this information will be updated in the information box above. If no peer-reviewed version is available, please cite this preprint using the following information:

Khachatryan, K.; Anter, S.; Reichling, M.; von Schmidsfeld, A. Beilstein Arch. 2024, 202429. doi:10.3762/bxiv.2024.29.v1

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